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Investigation of local electrical properties of coincidence-site-lattice boundaries in location-controlled silicon islands using scanning capacitance microscopy

机译：使用扫描电容显微镜研究位置控制的硅岛中重合点晶格边界的局部电学性质

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We used scanning capacitance microscopy (SCM) to investigate the electrical activity of grain boundaries consisting of random and coincidence-site-lattice (CSL) boundaries in location-controlled silicon islands, which were fabricated using the ?-Czochralski process with an excimer laser. The SCM results suggest that the electrical activity of the {122}?9 CSL boundary is much smaller than that of a random boundary, and the {111}?3 CSL boundary is negligible. This is consistent with previous theoretical predictions and experimental results for thin-film transistors.

机译：我们使用扫描电容显微镜（SCM）来研究由位置控制的硅岛中由随机和重合点晶格（CSL）边界组成的晶界的电活动，这些晶界是使用α-Czochralski工艺和受激准分子激光器制造的。 SCM结果表明{122}？9 CSL边界的电活动远小于随机边界，而{111}？3 CSL边界的电活动可忽略不计。这与先前关于薄膜晶体管的理论预测和实验结果一致。

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Matsuki, N.; Ishihara, R.; Baiano, A.; Beenakker, C.I.M.;
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年度 2008
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1. Investigation of local electrical properties of coincidence-site-lattice boundaries in location-controlled silicon islands using scanning capacitance microscopy [J] . Nobuyuki Matsuki, Ryoichi Ishihara, Alessando Baiano, Applied Physicsletters . 2008,第6期

机译：使用扫描电容显微镜研究位置控制的硅岛中重合点晶格边界的局部电学性质
2. Direct observation of the electrical activity of coincidence-site lattice boundaries in location-controlled silicon islands using scanning, spread resistance microscopy [J] . Nobuyuki Matsuki, Ryoichi Ishihara, Kees Beenakker Information Display . 2009,第3期

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4. Characterization of Local Electrical Property of Coincidence Site Lattice Boundary in Location-controlled Silicon Islands by Scanning Probe Microscopy [C] . N. Matsuki, R. Ishihara, A. Baiano, MRS fall meeting . 2008

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5. An investigative study of local variations in electrical properties of superconducting magnesium diboride thin films with variable-temperature scanning laser microscopy and applied mathematics. [D] . Price, Matthew B. 2004

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7. Investigation of local electrical properties of coincidence-site-lattice boundaries in location-controlled silicon islands using scanning capacitance microscopy [O] . Matsuki, N. (author), Ishihara, R. (author), Baiano, A. (author), 2008

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8. Excimer Laser Crystallization of Silicon Films: Artificially-Controlled Super Lateral Growth for Grain Boundary Location-Controlled and Single Crystal Island Materials for Thin Film Transistor Applications [R] . Im, J. S. , Sposili, R. S. 1998

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Investigation of local electrical properties of coincidence-site-lattice boundaries in location-controlled silicon islands using scanning capacitance microscopy

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